MEBW-60 L8

The standard version of the MEBW-60 L8 is equipped with a compact working chamber and turning chuck mounted on a CNC driven z-axis. The outer work piece dimensions can range from approx. ø 3 mm up to ø 135 mm.

MEBW-60 L95

The extended version MEBW-60 L95 is equipped with a CNC driven x/y table. It has a larger chamber which allows for workpiece dimensions of up to 300 x 250 x 200 mm and a x/y travel range of
± 75 mm.

MEBW-60 L135

The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.

Features

SEM Mode “Scan & View”

To weld in the micro range an exact positioning of the beam is required. With the FOCUS MEBW-60 the work piece can be observed in its totality and in the microscopic range up to a resolution of about 25µm by means of a scanning electron beam (SEM-mode). To generate the picture two alternative detectors can be selected. During the welding of dissimilar metals an enhanced material contrast is needed (0° detector) and to enhance the topographic contrast the 45° detector can be used.

Software Package

The included software package allows to program complex welding tasks with a CNC control unit, or for delicate parts like shown in the picture, with a “teach-in-programming” which allows the drawing of the designated welding trace into the SEM-Picture. To simplify the programming of the common weld tasks like circular welds we provide a very user friendly programming software, including spot welding to avoid distortion through the welding.

CNC System

For high-precision processing an exact workpiece manipulation is necessary. In order to achieve this, we have developed a CNC system with position accuracy less than 30 µm and a movement speed of up to 100 mm/s. For reduced maintenance, the stepper motors are located outside the chamber.

Whenever the workpiece requires axial or radial welding we offer different rotary manipulators which are fully integrated into the CNC control unit.

MEBW-60 L135 – Micro EB Welding meets Productivity

The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.

The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.

The MEBW-60 L135 is equipped with either a CNC driven bottom mounted x/y table or with a side mounted rotary manipulator. Conversion from a large single-drum into a six-drum rotary manipulator for high throughput and batch processing is very convenient. The optional egun-shift solution allows for maximum positioning flexibility.

Workpiece observation is realized with the unique FOCUS SEM Mode “Scan & View” or by traditional optical means using a camera/lens system combination. A low maintenance pumping system with high pumping speed allows for very fast turnaround cycles.

Extras

Multi drum rotary motion manipulator:
A modular multi drum rotary motion manipulator has been developed to allow welding of either one, six or even twelve workpieces within one vacuum cycle. The drive unit is mounted vertically or horizontally outside to the chamber. Inside the chamber, the drive unit can be equipped with either a one, a six or even a twelve fold rotary work piece holder.
An easy to use tooling helps to change quickly between different configurations. The motion is equipped with two motors for rotation and indexing and allows fastest cycle times. The devices can also be ordered with a tail stock or counter bearings.

Generator Slide:
The new generator slide allows for individual lateral positioning of the power beam in the vacuum chamber. In combination with the fixed mounted rotary motion manipulators, the generator slide allows for flexible beam positioning for radial or axial welds. Multiple radial or axial welds within one vacuum cycle is possible.

Turning- & Tilting Motion:
The modular tilt and turning device allows an angled position of the turning device for radial or axial welds. The tilting of the turning device allows for easy excess to fillet welds or other special welding geometries. This device includes several unique features, making it a more versatile tool for micro manipulation and welding. The devices grant a tight specification. Together with the minimized backlash and in combination with a precise x- y- table, free 3D interpolated workpiece positioning for welding or surface treatment becomes possible. Furthermore the turning device has a wide inner passage. This allows an easy manipulation and welding of long shafted rotational parts. Finally the devices are modular and easy to disassemble to be used separately.

Specifications

MEBW-60 L8MEBW-60 L95MEBW-60 L135
Accelerating voltagebetween 5 to 60 kV continuously adjustablebetween 5 to 60 kV continuously adjustablebetween 5 to 60 kV continuously adjustable
Maximum Beam
current
0.015 mA – 33 mA @ 60 kV, min step width 15µA, DC and fast pulse mode, min pulse width 10µsec0.015 mA – 33 mA @ 60 kV, min step width 15µA, DC and fast pulse mode, min pulse width 10µsec0.015 mA – 33 mA @ 60 kV, min step width 15µA, DC and fast pulse mode, min pulse width 10µsec
Beam
power
2 kW2 kW2 kW
Beam diameter @ 1mA< 50 μm< 50 μm< 50 μm
Maximum beam
deflection angle
±8°±8°±8° (depending on deflection system)
Working chamber
dimension
Ø235 mm x 200 mm500 x 500 x 400 mm ³500 x 500 x 540 mm ³
Work piece
dimension
Ø100 mm x 150 mm250 x 230 x 170 mm³250 x 230 x 170 mm³
Workpiece handlingLinear/rotary manipulatorx/y CNC table with internal rotary device (tilting as option)x/y CNC table with internal rotary device (tilting as option)   CNC single or six-drum rotary motion manipulator   CNC linear egun slide
Travel speed0.1 to 100 mm/s0.1 to 100 mm/s0.1 to 100 mm/s (x/y CNC table)   0.1 to 10 mm/s (CNC linear egun slide)
Rotary speedfrom 0.1 to 1000 rpm
continuously adjustable
from 0.1 to 100 rpm
continuously adjustable
from 0.1 to 30 rpm
continuously adjustable (CNC single or six-drum rotary motion manipulator)
Position accuracy< 30 µm< 30 µm< 30 µm
SEM image
resolution
down to approx. 25 μmdown to approx. 25 μmdown to approx. 25 μm
Pump down timeapprox. 2 minutesapprox. 3 minutesapprox. 3 minutes
Foot print2 m x 2 m (angled setup) or
1 m x 3 m (straight setup)
2 m x 2 m (angled setup) or
1 m x 3 m (straight setup)
2.3 m x 3.9 m (angled setup incl. rack) or
1 m x 3 m (straight setup)
Power Supply230 V / 3.6 kW, single phase400 V / 4.6 kW, triple phase400 V / 4.6 up to 10 kW, triple phase (depending on configuration)
Gross Weightapprox. 350 kgapprox. 750 kgapprox. 1500 kg